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TECHNICAL PAPER ABSTRACTS

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(All abstracts are in Adobe pdf format)

A Compact, Real-time, Point-of-Use Metal Ion Concentration Sensor for Liquids
Ron Chiarello, Agnieszka Jakubowicz, C. Eric Boyd, Christopher Wacinski and Douglas Fraser Jetalon Solutions, Inc. Campbell, CA

A Test Vehicle for Characterization of Processing Induced Physical Damages on Poly Lines
Bingxi Wood, Engineering/Technology Program Manager, Man-Ping Cai, Mike Smayling, Raymond Hung, Chorng-Ping Chang, Yongmei Chen, James Yu, Raj Kanuri Maydan Technology Center Group, Applied Materials

Alternative Method and Device to Purify and Deliver Water Vapor
By Jeffrey J. Spiegelman, President, RASIRC and Russell J. Holmes, Engineering Test Lab Manager, RASIRC

Analysis of Metals, Organics, Cations and Anions in IPA
Jason Wang, Michael J. West and Robert C. McDonald, Metara Inc. Sunnyvale, CA, USA

Analysis of Next Generation Precursor Compounds
by ICPMS Phil Clancy and Scott Anderson, Air Liquide-Balazs Analytical Services

Analysis Of Ultrapure Water By Laser Photon Ionization Mass Spectrometry
Harald Oser, Grace Chou, and Michael J. Coggiola, SRI International

Changing the Perception of Fluoropolymer Coating on Semiconductor Manufacturing Equipment
Chiaki Nakanishi, Nippon Fusso USA

Effect of Pump Pulsation and Particle Loading on Membrane Filter Retention
Mark R. Litchy1, Donald C. Grant1 and Reto Schoeb, CT Associates, Inc., Levitronix GmbH

Measuring the Performance of Flow Controllers Used In On-Site Chemical Mixing
Donald C. Grant, Founder and Gary Van Schooneveld, Vice President, CT Associates, Inc.

Online Ion Chromatography in the Semiconductor Industry: Analysis of Ultrapure DI Water
George Smith, Micron Technology, Inc.

Organic Acids in Ultrapure Water Prepared
by: Jeffrey A Hanson, P.E. Ultrapure Water Engineer Texas Instruments Inc.

Ozone Measurement Technology in Pure Water Systems
David M. Gray and Marc St. Germain, Product Management, Mettler-Toledo Thornton, Inc.

Particle Scouting in UPW
Sameer I. Madanshetty, Uncopiers, Inc.

Performance Analysis of Various Perfluoroelastomer Compounds in Aggressive Chemicals
Kay Cline, Senior Chemist, McMillan

PFA Trace Metals Leaching Study -- Determining Future Improvements in Bulk Chemical Delivery Distribution Systems
Kevin Pate, Corporate Facilities Engineering Department Intel Corporation

Rapid Characterization of Surfaces with Thin Films Using Mercury Probe Electrical Testing
John Moore, Ivan Lorkovic,a and Barton Gordonb, DAETEC, LLC, Materials Development Corp.

Real-Time Monitoring of Dilute Multi-Component Wet Processing Chemistries
Eugene Shalyt, Ira Hartman, Yehuda Shekel, Guang Liang, Peter Bratin, Chenting Lin, ECI Technology

The Application of Electrochemical Regenerated Ion Exchange (ERIXTM ) Technologies To Wastewater Recycle, Mixed Acid Wastes and Plating Bath Rinses
C. P. Jones*, A. M. Pierce, B. R. Roberts, BOC Edwards

Two New Tests for UPW – Meeting the Challenge for New Technologies
Sarah Schoen, Scott Anderson, David Bollinger, Martin Haddix, Air Liquide America – Balazs Analytical Services, Fremont, California; Dallas, Texas; and Countryside, Illinois, USA

 

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