TECHNICAL
PAPER ABSTRACTS
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A
Compact, Real-time, Point-of-Use Metal Ion Concentration Sensor
for Liquids
Ron Chiarello, Agnieszka Jakubowicz, C. Eric Boyd,
Christopher Wacinski and Douglas Fraser Jetalon Solutions, Inc.
Campbell, CA
A
Test Vehicle for Characterization of Processing Induced Physical
Damages on Poly Lines
Bingxi Wood, Engineering/Technology Program Manager,
Man-Ping Cai, Mike Smayling, Raymond Hung, Chorng-Ping Chang,
Yongmei Chen, James Yu, Raj Kanuri Maydan Technology Center Group,
Applied Materials
Alternative
Method and Device to Purify and Deliver Water Vapor
By Jeffrey J. Spiegelman, President, RASIRC and
Russell J. Holmes, Engineering Test Lab Manager, RASIRC
Analysis
of Metals, Organics, Cations and Anions in IPA
Jason Wang, Michael J. West and Robert C. McDonald,
Metara Inc. Sunnyvale, CA, USA
Analysis
of Next Generation Precursor Compounds
by ICPMS Phil Clancy and Scott Anderson, Air Liquide-Balazs
Analytical Services
Analysis
Of Ultrapure Water By Laser Photon Ionization Mass Spectrometry
Harald Oser, Grace Chou, and Michael J. Coggiola,
SRI International
Changing
the Perception of Fluoropolymer Coating on Semiconductor Manufacturing
Equipment
Chiaki Nakanishi, Nippon Fusso USA
Effect
of Pump Pulsation and Particle Loading on Membrane Filter Retention
Mark R. Litchy1, Donald C. Grant1 and Reto Schoeb,
CT Associates, Inc., Levitronix GmbH
Measuring
the Performance of Flow Controllers Used In On-Site Chemical Mixing
Donald C. Grant, Founder and Gary Van Schooneveld,
Vice President, CT Associates, Inc.
Online
Ion Chromatography in the Semiconductor Industry: Analysis of
Ultrapure DI Water
George Smith, Micron Technology, Inc.
Organic
Acids in Ultrapure Water Prepared
by: Jeffrey A Hanson, P.E. Ultrapure Water Engineer
Texas Instruments Inc.
Ozone
Measurement Technology in Pure Water Systems
David M. Gray and Marc St. Germain, Product Management,
Mettler-Toledo Thornton, Inc.
Particle
Scouting in UPW
Sameer I. Madanshetty, Uncopiers, Inc.
Performance
Analysis of Various Perfluoroelastomer Compounds in Aggressive
Chemicals
Kay Cline, Senior Chemist, McMillan
PFA
Trace Metals Leaching Study -- Determining Future Improvements
in Bulk Chemical Delivery Distribution Systems
Kevin Pate, Corporate Facilities Engineering
Department Intel Corporation
Rapid
Characterization of Surfaces with Thin Films Using Mercury Probe
Electrical Testing
John Moore, Ivan Lorkovic,a and Barton Gordonb,
DAETEC, LLC, Materials Development Corp.
Real-Time
Monitoring of Dilute Multi-Component Wet Processing Chemistries
Eugene Shalyt, Ira Hartman, Yehuda Shekel, Guang
Liang, Peter Bratin, Chenting Lin, ECI Technology
The
Application of Electrochemical Regenerated Ion Exchange (ERIXTM
) Technologies To Wastewater Recycle, Mixed Acid Wastes and Plating
Bath Rinses
C. P. Jones*, A. M. Pierce, B. R. Roberts, BOC
Edwards
Two
New Tests for UPW – Meeting the Challenge for New Technologies
Sarah Schoen, Scott Anderson, David Bollinger,
Martin Haddix, Air Liquide America – Balazs Analytical Services,
Fremont, California; Dallas, Texas; and Countryside, Illinois,
USA
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