SPWCC
is the only international conference to focus exclusively on the
performance and problems with wet processes in the semiconductor
chip manufacturing industry. With the expansion in 1999 from UPW,
chemicals and cleaning to wet processes used in the industry,
SPWCC attracts papers from industrial professionals around the
world who are addressing cleaning, etching, copper deposition,
and CMP processing. UPW and UPW systems, as well as high quality
chemicals such as peroxide, HF, etc., continue to be a very important
part of SPWCC conference presentations.

The
need for tighter quality control for wet processes in our industry
is so apparent that new on-line tools are being required to follow
real-time chemistry of the baths. With real-time data, the process
engineer can relate bath chemistry over time to wafer performance,
contamination, yield and cost. The newest information on processing
baths will be presented at SPWCC 2007 making this a very important
conference for process engineers.