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SPWCC 2007 Proceedings
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Available in 2008
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SPWCC
1219 Nightingale Court
Los Altos, CA 94024

Tel: 650.965.7229
FAX: 650.965.3070

 

 

 

 

 

 

 


 

 

 

ABOUT US

SPWCC is the only international conference to focus exclusively on the performance and problems with wet processes in the semiconductor chip manufacturing industry. With the expansion in 1999 from UPW, chemicals and cleaning to wet processes used in the industry, SPWCC attracts papers from industrial professionals around the world who are addressing cleaning, etching, copper deposition, and CMP processing. UPW and UPW systems, as well as high quality chemicals such as peroxide, HF, etc., continue to be a very important part of SPWCC conference presentations.

The need for tighter quality control for wet processes in our industry is so apparent that new on-line tools are being required to follow real-time chemistry of the baths. With real-time data, the process engineer can relate bath chemistry over time to wafer performance, contamination, yield and cost. The newest information on processing baths will be presented at SPWCC 2007 making this a very important conference for process engineers.


 
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